Authors: ZACHARIASSE JMF WALKER JF

Citation: Jmf. Zachariasse et Jf. Walker, DIRECT WRITE PATTERNING OF TITANIUM FILMS USING FOCUSED ION-BEAM IMPLANTATION AND PLASMA-ETCHING, Microelectronic engineering, 35(1-4), 1997, pp. 63-66

Authors: ZACHARIASSE JMF BROERS AN

Citation: Jmf. Zachariasse et An. Broers, THE DEPENDENCE OF NANOSTRUCTURE ETCH RATES ON FEATURE SIZE, Microelectronic engineering, 30(1-4), 1996, pp. 349-352