Authors:
PRIOLI R
ZANETTE SI
CARIDE AO
FRANCESCHINI DF
FREIRE FL
Citation: R. Prioli et al., ATOMIC-FORCE MICROSCOPY OF AMORPHOUS HYDROGENATED CARBON-NITROGEN FILMS DEPOSITED BY RADIO-FREQUENCY-PLASMA DECOMPOSITION OF METHANE-AMMONIA GAS-MIXTURES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(4), 1996, pp. 2351-2355