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MAGNETIC MICROACTUATION OF POLYSILICON FLEXURE STRUCTURES (VOL 4, PG 162, 1995)
Authors: JUDY JW MULLER RS ZAPPE HH
Citation: Jw. Judy et al., MAGNETIC MICROACTUATION OF POLYSILICON FLEXURE STRUCTURES (VOL 4, PG 162, 1995), Journal of microelectromechanical systems, 5(1), 1996, pp. 73-73
MAGNETIC MICROACTUATION OF POLYSILICON FLEXURE STRUCTURES
Authors: JUDY JW MULLER RS ZAPPE HH
Citation: Jw. Judy et al., MAGNETIC MICROACTUATION OF POLYSILICON FLEXURE STRUCTURES, Journal of microelectromechanical systems, 4(4), 1995, pp. 162-169
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