Authors: STEMMER A ZARSCHIZKY H KNAPEK E LEFRANC G MAYERHOFER F

Citation: A. Stemmer et al., EFFICIENCY ENHANCEMENT OF DIFFRACTIVE OPTICAL-ELEMENTS BY VARIABLE RELIEF PROFILING, Microelectronic engineering, 27(1-4), 1995, pp. 171-174

Authors: ZARSCHIZKY H STEMMER A KNAPEK E LEFRANC G

Citation: H. Zarschizky et al., DESIGN, CAD-DATA GENERATION AND FABRICATION OF DIFFRACTIVE LENSES WITH SUBMICRON FEATURE SIZES, Microelectronic engineering, 27(1-4), 1995, pp. 175-178

Authors: STEMMER A ZARSCHIZKY H KNAPEK E LEFRANC G MAYERHOFER F

Citation: A. Stemmer et al., HIGH-EFFICIENCY DIFFRACTIVE COUPLING LENSES BY 3-DIMENSIONAL PROFILING WITH ELECTRON-BEAM LITHOGRAPHY AND REACTIVE ION ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3635-3638

Authors: ZARSCHIZKY H GERNDT C HONSBERG M SCHNEIDER HW STEMMER A

Citation: H. Zarschizky et al., OPTICAL CLOCK DISTRIBUTION WITH A COMPACT FREE-SPACE INTERCONNECT SYSTEM, Optical and quantum electronics, 26(5), 1994, pp. 190000471-190000481

Authors: ZARSCHIZKY H STEMMER A MAYERHOFER F LEFRANC G GRAMANN W

Citation: H. Zarschizky et al., BINARY AND MULTILEVEL DIFFRACTIVE LENSES WITH SUBMICROMETER FEATURE SIZES, Optical engineering, 33(11), 1994, pp. 3527-3536

Authors: STEMMER A ZARSCHIZKY H KNAPEK E LEFRANC G SCHERERWINNER H

Citation: A. Stemmer et al., DESIGN AND FABRICATION OF MULTILEVEL DIFFRACTIVE OPTICAL-ELEMENTS (DOES) AND HOLOGRAPHIC OPTICAL-ELEMENTS (HOES), Microelectronic engineering, 21(1-4), 1993, pp. 471-474