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SIMULATION OF CHEMICAL-VAPOR-DEPOSITION OF SIC FROM METHYLTRICHLOROSILANE IN A HOT-WALL REACTOR
Authors: NEUSCHUTZ D SCHIERLING M ZIMDAHL S
Citation: D. Neuschutz et al., SIMULATION OF CHEMICAL-VAPOR-DEPOSITION OF SIC FROM METHYLTRICHLOROSILANE IN A HOT-WALL REACTOR, Journal de physique. IV, 5(C5), 1995, pp. 253-260
SIMULATION OF CHEMICAL-VAPOR-DEPOSITION OF SIC FROM METHYLTRICHLOROSILANE IN A HOT-WALL REACTOR
Authors: NEUSCHUTZ D SCHIERLING M ZIMDAHL S
Citation: D. Neuschutz et al., SIMULATION OF CHEMICAL-VAPOR-DEPOSITION OF SIC FROM METHYLTRICHLOROSILANE IN A HOT-WALL REACTOR, Journal de physique. IV, 5(C5), 1995, pp. 253-260
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