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Results: 1
MODIFICATION OF NEAR-SURFACE REGIONS IN SI BY LOW-ENERGY PARTICLES
Authors:
KLOSE HA THIELE P ZINNOW S
Citation:
Ha. Klose et al., MODIFICATION OF NEAR-SURFACE REGIONS IN SI BY LOW-ENERGY PARTICLES, Surface & coatings technology, 59(1-3), 1993, pp. 221-225
Risultati:
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