Authors: YANOF AW ZIPFEL GL MOON EE

Citation: Aw. Yanof et al., X-RAY MASK MEMBRANE MOTION IN NARROW-GAP LITHOGRAPHY - HYDRODYNAMIC MODEL AND EXPERIMENT, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2920-2925