Authors: ZUBEL I BARYCKA I

Citation: I. Zubel et I. Barycka, SILICON ANISOTROPIC ETCHING IN ALKALINE-SOLUTIONS I - THE GEOMETRIC DESCRIPTION OF FIGURES DEVELOPED UNDER ETCHING SI(100) IN VARIOUS SOLUTIONS, Sensors and actuators. A, Physical, 70(3), 1998, pp. 250-259

Authors: ZUBEL I

Citation: I. Zubel, SILICON ANISOTROPIC ETCHING IN ALKALINE-SOLUTIONS II - ON THE INFLUENCE OF ANISOTROPY ON THE SMOOTHNESS OF ETCHED SURFACES, Sensors and actuators. A, Physical, 70(3), 1998, pp. 260-268

Authors: BARYCKA I ZUBEL I

Citation: I. Barycka et I. Zubel, SILICON ANISOTROPIC ETCHING IN KOH-ISOPROPANOL ETCHANT, Sensors and actuators. A, Physical, 48(3), 1995, pp. 229-238