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Results: 1
Wafer-to-wafer bonding of nonplanarized MEMS surfaces using solder
Authors:
Sparks, D Queen, G Weston, R Woodward, G Putty, M Jordan, L Zarabadi, S Jayakar, K
Citation:
D. Sparks et al., Wafer-to-wafer bonding of nonplanarized MEMS surfaces using solder, J MICROM M, 11(6), 2001, pp. 630-634
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