Authors:
Tada, H
Kumpel, AE
Lathrop, RE
Slanina, JB
Nieva, P
Zavracky, P
Miaoulis, IN
Wong, PY
Citation: H. Tada et al., Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high temperatures, J APPL PHYS, 87(9), 2000, pp. 4189-4193
Authors:
Abramson, AR
Nieva, P
Tada, H
Zavracky, P
Miaoulis, IN
Wong, PY
Citation: Ar. Abramson et al., Effect of doping level during rapid thermal processing of multilayer structures, J MATER RES, 14(6), 1999, pp. 2402-2410