Authors: Gross, TS bin Kamsah, N Tsukrov, II

Citation: Ts. Gross et al., Scanning probe microscopy generated out-of-plane deformation maps exhibiting heterogeneous nanoscale deformation resulting from thermal cycling of Cu-polyimide damascene interconnects, J MATER RES, 16(12), 2001, pp. 3560-3566

Authors: Gross, TS Prindle, CM Chamberlin, K bin Kamsah, N Wu, YY

Citation: Ts. Gross et al., Two-dimensional, electrostatic finite element study of tip-substrate interactions in electric force microscopy of high density inter-connect structures, ULTRAMICROS, 87(3), 2001, pp. 147-154