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Results: 1-4 |
Results: 4

Authors: Visser, MM Weichel, S Storas, P de Reus, R Hanneborg, AB
Citation: Mm. Visser et al., Sodium distribution in thin-film anodic bonding, SENS ACTU-A, 92(1-3), 2001, pp. 223-228

Authors: Weichel, S de Reus, R Bouaidat, S Rasmussen, PA Hansen, O Birkelund, K Dirac, H
Citation: S. Weichel et al., Low-temperature anodic bonding to silicon nitride, SENS ACTU-A, 82(1-3), 2000, pp. 249-253

Authors: Christensen, C de Reus, R Bouwstra, S
Citation: C. Christensen et al., Tantalum oxide thin films as protective coatings for sensors, J MICROM M, 9(2), 1999, pp. 113-118

Authors: de Reus, R Gullov, JO Scheeper, PR
Citation: R. De Reus et al., Fabrication and characterization of a piezoelectric accelerometer, J MICROM M, 9(2), 1999, pp. 123-126
Risultati: 1-4 |