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Results:
1-4
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Results: 4
Sodium distribution in thin-film anodic bonding
Authors:
Visser, MM Weichel, S Storas, P de Reus, R Hanneborg, AB
Citation:
Mm. Visser et al., Sodium distribution in thin-film anodic bonding, SENS ACTU-A, 92(1-3), 2001, pp. 223-228
Low-temperature anodic bonding to silicon nitride
Authors:
Weichel, S de Reus, R Bouaidat, S Rasmussen, PA Hansen, O Birkelund, K Dirac, H
Citation:
S. Weichel et al., Low-temperature anodic bonding to silicon nitride, SENS ACTU-A, 82(1-3), 2000, pp. 249-253
Tantalum oxide thin films as protective coatings for sensors
Authors:
Christensen, C de Reus, R Bouwstra, S
Citation:
C. Christensen et al., Tantalum oxide thin films as protective coatings for sensors, J MICROM M, 9(2), 1999, pp. 113-118
Fabrication and characterization of a piezoelectric accelerometer
Authors:
de Reus, R Gullov, JO Scheeper, PR
Citation:
R. De Reus et al., Fabrication and characterization of a piezoelectric accelerometer, J MICROM M, 9(2), 1999, pp. 123-126
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1-4
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