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Citation: S. Kuiper et al., Fabrication of microsieves with sub-micron pore size by laser interferencelithography, J MICROM M, 11(1), 2001, pp. 33-37

Authors: van Rijn, CJM Nijdam, W Kulper, S Veldhuis, GJ van Wolferen, H Elwenspoek, M

Citation: Cjm. Van Rijn et al., Microsieves made with laser interference lithography for micro-filtration applications, J MICROM M, 9(2), 1999, pp. 170-172