EXPERIMENTAL-STUDY ON INTERMEDIATE AND GRADIENT-INDEX DIELECTRIC THIN-FILMS BY A NOVEL REACTIVE SPUTTERING METHOD

Here we report a novel reactive sputtering method, called two-stage hi gh rate reactive sputtering method, its principles, and apparatus setu p, and the results of optical properties of thin films obtained by thi s method. Then two typical antireflection coatings, one with an interm ediate and homogeneous layer and the other with a gradient layer, have been successfully produced by this method. Their spectrum performance s and microstructures are also presented. (C) I997 American Vacuum Soc iety.