LOW-ENERGY BROAD-BEAM ELECTRON-GUN

Authors
BAREFOOT TW EBINGER HD YATES JT
Citation
Tw. Barefoot et al., LOW-ENERGY BROAD-BEAM ELECTRON-GUN, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(5), 1997, pp. 2740-2742
Citations number
11
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
15
Issue
5
Year of publication
1997
Pages
2740 - 2742
Database
ISI
SICI code
0734-2101(1997)15:5<2740:LBE>2.0.ZU;2-R
Abstract
A low-energy electron gun for the energy range of 5-100 eV providing a uniform and high electron flux over a circular surface area of severa l cm(2) has been designed and tested. Focusing elements allow one to v ary the beam diameter according to experimental needs. The uniform cur rent densities make it suitable for the study of electron stimulated s urface chemistry and thin-film production. (C) 1997 American Vacuum So ciety.