SURFACE PHOTOABSORPTION MONITORING OF THE GROWTH OF GAAS AND INGAAS AT 650-DEGREES-C BY MOCVD

Citation
Yd. Kim et al., SURFACE PHOTOABSORPTION MONITORING OF THE GROWTH OF GAAS AND INGAAS AT 650-DEGREES-C BY MOCVD, Journal of electronic materials, 26(10), 1997, pp. 1164-1168
Citations number
18
Categorie Soggetti
Engineering, Eletrical & Electronic","Material Science
ISSN journal
03615235
Volume
26
Issue
10
Year of publication
1997
Pages
1164 - 1168
Database
ISI
SICI code
0361-5235(1997)26:10<1164:SPMOTG>2.0.ZU;2-D
Abstract
By monitoring the cyclic behavior of surface photoabsorption (SPA) ref lectance changes during the growth of GaAs at 650 degrees C and with s ufficient H-2 purging time between the supply of trimethylgallium and AsH3, we have been able to achieve controlled growth of GaAs down to a monolayer. Our results show, as confirmed by photoluminescence (PL) m easurements, the possibility of growing highly accurate quantum well h eterostructures by metalorganic chemical vapor deposition at conventio nal growth temperatures. We also present our PL measurements on the In GaAs single quantum wells grown at this temperature by monitoring the SPA signal.