The growth, structure and room temperature electrical conductivity of
electron beam evaporated V2O5 thin films were studied in detail as a f
unction of deposition temperature. The films deposited at T-s approxim
ate to 553 K and subsequently annealed in oxygen atmosphere at 693 K e
xhibited orthorhombic layered structure. (C) 1997 Elsevier Science S.A
.