W. Joppich et S. Mijalkovic, RECENT ADVANCES AND TRENDS IN NUMERICAL TECHNIQUES FOR PROCESS SIMULATION, Microelectronics and reliability, 37(9), 1997, pp. 1329-1339
The gradually increasing complexity of the processing models and neces
sity to simulate in higher dimensions persistently challenges computat
ional efficiency of the modern process simulators. In this paper, an o
utlook on the current status and trends in numerical techniques for ef
ficient multidimensional bulk process simulation is given. Grid genera
tion, grid adaptation, discretization and solving techniques are consi
dered as the principle numerical building blocks of modern process sim
ulation tools. The major task and obstacles for each of these numerica
l segments are recognized, and some recently proposed techniques to ci
rcumvent current limitations, as well as possible directions for futur
e research are discussed. (C) 1995 IEEE. Published by Elsevier Science
Ltd.