RECENT ADVANCES AND TRENDS IN NUMERICAL TECHNIQUES FOR PROCESS SIMULATION

Citation
W. Joppich et S. Mijalkovic, RECENT ADVANCES AND TRENDS IN NUMERICAL TECHNIQUES FOR PROCESS SIMULATION, Microelectronics and reliability, 37(9), 1997, pp. 1329-1339
Citations number
36
Categorie Soggetti
Engineering, Eletrical & Electronic
ISSN journal
00262714
Volume
37
Issue
9
Year of publication
1997
Pages
1329 - 1339
Database
ISI
SICI code
0026-2714(1997)37:9<1329:RAATIN>2.0.ZU;2-Q
Abstract
The gradually increasing complexity of the processing models and neces sity to simulate in higher dimensions persistently challenges computat ional efficiency of the modern process simulators. In this paper, an o utlook on the current status and trends in numerical techniques for ef ficient multidimensional bulk process simulation is given. Grid genera tion, grid adaptation, discretization and solving techniques are consi dered as the principle numerical building blocks of modern process sim ulation tools. The major task and obstacles for each of these numerica l segments are recognized, and some recently proposed techniques to ci rcumvent current limitations, as well as possible directions for futur e research are discussed. (C) 1995 IEEE. Published by Elsevier Science Ltd.