SENSOR MICROSYSTEMS

The systems approach to designing sensor microsystems is emphasized as a means of improving their performance. The following basic synergeti c relationships between the components of a microsystem are identified : compensation, feedback, chopping and mass effects. Some selected exa mples of the application of these principles in sensor microsystems ar e discussed. The choice of the integration technology for the realizat ion of a sensor microsystem depends strongly on the involved market si ze. The larger the market, the more fundamental integration technology should be applied. (C) 1995 IEEE. Published by Elsevier Science Ltd.