In this paper, the extension of numerical simulation techniques to the
analysis of light-addressable potentiometric sensors (LAPS) is discus
sed in detail, To this purpose, proper physical models of both the ion
-sensitive and the photo-sensitive transduction mechanisms have been i
ncorporated into the framework of a general-purpose device simulator,
A self-consistent, accurate picture of charge transport within the dev
ice under the combined action of electrolyte ion layers and of luminou
s stimulus is recovered, which in turn, allows for detailed analysis o
f the device behavior and for fine-tuning of fabrication process. Exte
nsive comparison with actual LAPS measurement has been performed, vali
dating the tool and illustrating its flexibility and application range
.