THE THERMALLY BALANCED BRIDGE TECHNIQUE (TBBT) - A NEW HIGH-RESOLUTION RESISTOMETRIC MEASUREMENT TECHNIQUE FOR THE STUDY OF ELECTROMIGRATION-INDUCED EARLY RESISTANCE CHANGES IN METAL STRIPES

Authors
VANOLMEN J DECEUNINCK W DESCHEPPER L GOLDONI A CERVINI A FANTINI F
Citation
J. Vanolmen et al., THE THERMALLY BALANCED BRIDGE TECHNIQUE (TBBT) - A NEW HIGH-RESOLUTION RESISTOMETRIC MEASUREMENT TECHNIQUE FOR THE STUDY OF ELECTROMIGRATION-INDUCED EARLY RESISTANCE CHANGES IN METAL STRIPES, Microelectronics and reliability, 37(10-11), 1997, pp. 1483-1486
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Microelectronics and reliability → ACNP
ISSN journal
00262714
Volume
37
Issue
10-11
Year of publication
1997
Pages
1483 - 1486
Database
ISI
SICI code
0026-2714(1997)37:10-11<1483:TTBBT(>2.0.ZU;2-H
Abstract
A new high resolution resistometric measurement technique has been dev eloped in order to perform accurate early resistance change measuremen ts on metal lines submitted to high current densities. This new techni que consists of a refined bridge technique resulting in resistance cha nge curves showing only electron-wind induced resistance changes. When performed in a furnace with a high temperature stability the resistan ce change curves of the individual stripes (test and reference) can be monitored individually with a high resolution. (C) 1997 Elsevier Scie nce Ltd.