MMIC IN-CIRCUIT AND IN-DEVICE TESTING WITH AN ON-WAFER HIGH-FREQUENCYELECTRIC FORCE MICROSCOPE TEST SYSTEM

In-circuit and in-device tests give valuable information for detailed function and failure analysis of monolithic microwave integrated circu its (MMIC), if simultaneously high spatial resolution, GHz signal meas urement ability and topographic imaging are achieved. Therefore a new high frequency electric force microscope was used to investigate the e lectrical behavior and function of devices and components within a 0-2 7 GHz traveling wave amplifier (TWA) by spatially resolved on wafer ma ppings of device internal voltages. Furthermore, comparisons between m easured and simulated data allow the internal localization of malfunct ion MMIC components, to give hints for a re-design. (C) 1997 Elsevier Science Ltd.