ABSOLUTE QUANTITATIVE TIME-RESOLVED VOLTAGE MEASUREMENTS ON 1 MU-M CONDUCTING LINES OF INTEGRATED-CIRCUITS VIA ELECTRIC FORCE MICROSCOPE-(EFM-) TESTING

Authors
BANGERT J KUBALEK E
Citation
J. Bangert et E. Kubalek, ABSOLUTE QUANTITATIVE TIME-RESOLVED VOLTAGE MEASUREMENTS ON 1 MU-M CONDUCTING LINES OF INTEGRATED-CIRCUITS VIA ELECTRIC FORCE MICROSCOPE-(EFM-) TESTING, Microelectronics and reliability, 37(10-11), 1997, pp. 1579-1582
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Microelectronics and reliability → ACNP
ISSN journal
00262714
Volume
37
Issue
10-11
Year of publication
1997
Pages
1579 - 1582
Database
ISI
SICI code
0026-2714(1997)37:10-11<1579:AQTVMO>2.0.ZU;2-6
Abstract
This paper reports on a novel EFM-testing system for absolute quantita tive voltage measurements. It shows improved performance data enabling quantitative EFM-testing within today's integrated circuits (ICs) for the first time. This novel testing system is opening new possibilitie s of TC internal function and failure analysis due to submicrometer sp atial and some tens of nanoseconds time resolution limits in combinati on with high sensitivity of some tens of millivolt. (C) 1997 Elsevier Science Ltd.