HIGH-SENSITIVITY AND HIGH-RESOLUTION DIFFERENTIAL INTERFEROMETER - MICROMETRIC POLARISCOPE FOR THERMOMECHANICAL STUDIES IN MICROELECTRONICS

Authors
DILHAIRE S PHAN T SCHAUB E CLAEYS W
Citation
S. Dilhaire et al., HIGH-SENSITIVITY AND HIGH-RESOLUTION DIFFERENTIAL INTERFEROMETER - MICROMETRIC POLARISCOPE FOR THERMOMECHANICAL STUDIES IN MICROELECTRONICS, Microelectronics and reliability, 37(10-11), 1997, pp. 1587-1590
Citations number
14
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Microelectronics and reliability → ACNP
ISSN journal
00262714
Volume
37
Issue
10-11
Year of publication
1997
Pages
1587 - 1590
Database
ISI
SICI code
0026-2714(1997)37:10-11<1587:HAHDI->2.0.ZU;2-6
Abstract
A high sensitivity and high resolution laser probe devoted to the ther momechanical studies of microelectronic interconnects has been develop ed. Surface displacements as low as 0.1 picometer (10(-13)m) can be ob served, this allows the laser probe to investigate the edge effect in interconnects. The stress field induced by the edge forces in the unde rlying silicon dioxide layers has been observed. All measurements are performed with a micrometric lateral resolution. (C) 1997 Elsevier Sci ence Ltd.