MODIFICATION AND APPLICATION OF AN EMISSION MICROSCOPE FOR CONTINUOUSWAVELENGTH SPECTROSCOPY

Authors
RASRAS M DEWOLF I GROESENEKEN G MAES HE
Citation
M. Rasras et al., MODIFICATION AND APPLICATION OF AN EMISSION MICROSCOPE FOR CONTINUOUSWAVELENGTH SPECTROSCOPY, Microelectronics and reliability, 37(10-11), 1997, pp. 1595-1598
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Microelectronics and reliability → ACNP
ISSN journal
00262714
Volume
37
Issue
10-11
Year of publication
1997
Pages
1595 - 1598
Database
ISI
SICI code
0026-2714(1997)37:10-11<1595:MAAOAE>2.0.ZU;2-B
Abstract
A simple, cost effective, and highly sensitive spectroscopic technique for photon emission microscopy is proposed (SPEMMI). In contrast to e arlier reported systems, this new system uses only one detector for bo th conventional failure localisation and spectral analysis. To demonst rate the functionality of the SPEMMI, emission spectra from forward an d reversed biased diodes, and from a poly-Si resistor are presented. I n addition, it is shown that the instrument allows fast determination, with mu m resolution, of the temperature profile of devices. (C) 1997 Elsevier Science Ltd.