C. Ciofi et al., COMMENTS ON THE UTILIZATION OF NOISE MEASUREMENTS FOR THE CHARACTERIZATION OF ELECTROMIGRATION IN METAL LINES, Microelectronics and reliability, 37(10-11), 1997, pp. 1607-1610
Some of the problems connected with the characterization of electromig
ration by means of noise measurements are discussed in this paper. Som
e specific criticisms moved in the past toward the interpretation of t
he experimental data are also addressed. In particular, the question o
f the interpretation of the 1/f(2) noise component is discussed. Final
ly, a set of rules are given which should be followed, both in the cho
ice of the instrumentation and in performing the measurements, in orde
r to obtain meaningful and reliable results. (C) 1997 Elsevier Science
Ltd.