APPLICATIONS OF SCANNING ELECTRICAL FORCE MICROSCOPY

Authors
MULLER F MULLER AD HIETSCHOLD M KAMMER S
Citation
F. Muller et al., APPLICATIONS OF SCANNING ELECTRICAL FORCE MICROSCOPY, Microelectronics and reliability, 37(10-11), 1997, pp. 1631-1634
Citations number
3
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Microelectronics and reliability → ACNP
ISSN journal
00262714
Volume
37
Issue
10-11
Year of publication
1997
Pages
1631 - 1634
Database
ISI
SICI code
0026-2714(1997)37:10-11<1631:AOSEFM>2.0.ZU;2-M
Abstract
The capabilities of Scanning Electrical Force Microscopy (SEFM) based on non-contact AFM (atomic force microscopy) concerning the characteri zation of microelectronic structures of silicon are presented. Surface potential differences due to carrier generation and capacitance diffe rences due to oxide layers are discussed at examples of lateral and cr oss-sectional images of a resistance and a MOS-structure. (C) 1997 Els evier Science Ltd.