MICROSTEREOPHOTOLITHOGRAPHY USING A LIQUID-CRYSTAL DISPLAY AS DYNAMICMASK-GENERATOR

Citation
A. Bertsch et al., MICROSTEREOPHOTOLITHOGRAPHY USING A LIQUID-CRYSTAL DISPLAY AS DYNAMICMASK-GENERATOR, Microsystem technologies, 3(2), 1997, pp. 42-47
Citations number
9
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
ISSN journal
09467076
Volume
3
Issue
2
Year of publication
1997
Pages
42 - 47
Database
ISI
SICI code
0946-7076(1997)3:2<42:MUALDA>2.0.ZU;2-J
Abstract
A new laser microstereophotolithography process has been developed in our laboratory to manufacture three-dimensional parts with a high accu racy. As usual in laser stereophotolithography or laser microstereopho tolithography, the part is manufactured layer by layer by a light-indu ced space-resolved polymerization. Until now, in all the already exist ing microstereophotolithography devices a layer is manufactured vector by vector, by moving the part beneath the initiating light source whi ch remains motionless. We developed a simpler and easier process, in w hich we can manufacture an entire layer by irradiating its whole surfa ce only once: we used a liquid crystal display as a dynamic generator of masks. In the device we set up, we need only one mobile element, th e z translator, all the others are fixed. We manufactured several diff erent 3D microparts, in particular a piece of bevel microgearing with helicoidal cogs, the volume of which is less than half a cubic millime tre.