A. Bertsch et al., MICROSTEREOPHOTOLITHOGRAPHY USING A LIQUID-CRYSTAL DISPLAY AS DYNAMICMASK-GENERATOR, Microsystem technologies, 3(2), 1997, pp. 42-47
A new laser microstereophotolithography process has been developed in
our laboratory to manufacture three-dimensional parts with a high accu
racy. As usual in laser stereophotolithography or laser microstereopho
tolithography, the part is manufactured layer by layer by a light-indu
ced space-resolved polymerization. Until now, in all the already exist
ing microstereophotolithography devices a layer is manufactured vector
by vector, by moving the part beneath the initiating light source whi
ch remains motionless. We developed a simpler and easier process, in w
hich we can manufacture an entire layer by irradiating its whole surfa
ce only once: we used a liquid crystal display as a dynamic generator
of masks. In the device we set up, we need only one mobile element, th
e z translator, all the others are fixed. We manufactured several diff
erent 3D microparts, in particular a piece of bevel microgearing with
helicoidal cogs, the volume of which is less than half a cubic millime
tre.