AN APPROACH TO LAYOUT AND PROCESS VERIFICATION FOR MICROSYSTEM PHYSICAL DESIGN

The physical phases of microsystem design are concerned with generatin g all data needed to fabricate microstructures. As lithography-based t echnologies are used to fabricate MEMS, this includes the design of tw o-dimensional mask layouts as well as the design of process step seque nces and parameters which determine the object extensions in the third dimension. LIDO is a MEMS physical design system that supports this c oncurrent design strategy by providing tools to easily configure appro priate process sequences, to derive consistent sets of geometric layou t design rules from them and to use these design rules to verify mask layouts.