FINITE-ELEMENT INVESTIGATIONS OF THE DYNAMICAL PROPERTIES OF MICROSTRUCTURED MEMBRANES

Authors
ELSASSER R KAMLAH M TSAKMAKIS C
Citation
R. Elsasser et al., FINITE-ELEMENT INVESTIGATIONS OF THE DYNAMICAL PROPERTIES OF MICROSTRUCTURED MEMBRANES, Microsystem technologies, 3(4), 1997, pp. 171-177
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Microsystem technologies → ACNP
ISSN journal
09467076
Volume
3
Issue
4
Year of publication
1997
Pages
171 - 177
Database
ISI
SICI code
0946-7076(1997)3:4<171:FIOTDP>2.0.ZU;2-Y
Abstract
Microstructured membranes (microdiaphragms) are a tool for measuring q uantities such as temperature, strain, or density by ultrasound, i.e. without any contact (e.g. by a wire connection). In this paper we stud y the dynamical properties of such microstructured membranes numerical ly by means of the finite element method. In particular, we consider t he shape of the eigenmodes of the system and study the dependence of t he corresponding eigenfrequencies on material and geometry parameters.