DEPOSITION OF DIAMOND FROM ALCOHOL PRECURSORS IN AN ELECTRON-CYCLOTRON-RESONANCE PLASMA SYSTEM

Microstructural control is a critical issue in the use of diamond film s ina variety of engineering applications, Using a novel, electrostati c-based particle seeding process, Ne have investigated the deposition of diamond films with varying areal nucleation densities, Depositions were performed at low pressures (1.000 and 1.500 Torr) in a modified e lectron cyclotron resonance plasma system. Methyl alcohol was the prim ary diamond precursor species. Scanning electromicroscopy and Raman sp ectroscopy were used to evaluate microstructure and composition charac teristics. Comparisons in deposition characteristics were made based o n relative nucleation density and gas-phase composition.