GROWTH AND ELECTRICAL-PROPERTIES OF (211)BATIO3 THIN-FILMS ON PT-COATED SI(100) SUBSTRATES

Authors
SU QX RABSON TA ROBERT M
Citation
Qx. Su et al., GROWTH AND ELECTRICAL-PROPERTIES OF (211)BATIO3 THIN-FILMS ON PT-COATED SI(100) SUBSTRATES, Integrated ferroelectrics, 18(1-4), 1997, pp. 415-424
Citations number
6
Categorie Soggetti
Physics, Condensed Matter","Engineering, Eletrical & Electronic","Physics, Applied
Journal title
Integrated ferroelectrics → ACNP
ISSN journal
10584587
Volume
18
Issue
1-4
Year of publication
1997
Pages
415 - 424
Database
ISI
SICI code
1058-4587(1997)18:1-4<415:GAEO(T>2.0.ZU;2-J
Abstract
Barium titanate (BaTiO3) thin films with high (211) orientation have b een prepared on Pt(111)/Si(100) substrates by R.F. magnetron sputterin g at a substrate temperature between 550 degrees C and 580 degrees C i n an Ar/O-2 atmosphere. The I-V curve of a thin film capacitor (Ag-BaT iO3-Pt) has been measured and the C-V curves are obtained for frequenc ies between 100Hz and 1MHz. Neither the I-V curve nor the C-V curves a re symmetrical and a very large change in the slope of all curves is f ound to occur at similar to+0.5v.