Wd. Song et al., IN-SITU DEPOSITION OF YBA2CU3O7-X SUPERCONDUCTING THIN-FILM WITHOUT HIGH-PRESSURE OXYGEN DURING FILM-COOLING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(2), 1994, pp. 533-535
Citations number
13
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
YBa2Cu3O7-x thin films were deposited by excimer laser ablation with t
hree different kinds of film-cooling processes. The films cooled under
300 Torr of oxygen pressure and 200 mTorr of oxygen pressure with dc
discharge assistance were superconductive. The zero-resistance tempera
tures were 86.5 K and critical current densities in zero field at 77 K
were more than 10(6) A/cm2, while the films cooled under 200 mTorr of
oxygen pressure were semiconductive.