NEW ASPECTS OF K PROMOTED NITRIDATION OF THE INP(100) SURFACE

Citation
L. Huang et al., NEW ASPECTS OF K PROMOTED NITRIDATION OF THE INP(100) SURFACE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(2), 1997, pp. 374-376
Citations number
8
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
ISSN journal
07342101
Volume
15
Issue
2
Year of publication
1997
Pages
374 - 376
Database
ISI
SICI code
0734-2101(1997)15:2<374:NAOKPN>2.0.ZU;2-R
Abstract
The effect of molecular nitrogen exposure on the InP(100) surface modi fied by the alkali metal K overlayer is investigated by core-level pho toemission spectroscopy using synchrotron radiation. The alkali metal covered surface exhibits reasonable nitrogen uptake at room temperatur e, and results in the formation of a P3N5 nitride complex. Flash annea ling at 400 degrees C greatly enhanced the formation of this kind of n itride complex. Above 500 degrees C, the nitride complex dissolved com pletely. (C) 1997 American Vacuum Society.