WORK FUNCTION DETERMINATION OF ZINC-OXIDE FILMS

Authors
SUNDARAM KB KHAN A
Citation
Kb. Sundaram et A. Khan, WORK FUNCTION DETERMINATION OF ZINC-OXIDE FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(2), 1997, pp. 428-430
Citations number
12
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
Journal title
Journal of vacuum science & technology. A. Vacuum, surfaces, and films → ACNP
ISSN journal
07342101
Volume
15
Issue
2
Year of publication
1997
Pages
428 - 430
Database
ISI
SICI code
0734-2101(1997)15:2<428:WFDOZF>2.0.ZU;2-Q
Abstract
Zinc oxide-silicon heterojunctions were fabricated using both n- and p -type silicon. The zinc oxide films were deposited by the magnetron sp uttering process at various substrate temperatures to form these devic es. The electrical properties of these devices were measured and the w ork function of the zinc oxide was evaluated from these properties. (C ) 1997 American Vacuum Society.