IMPROVEMENT IN MOLECULAR-BEAM EPITAXY MACHINE RELIABILITY USING PREVENTIVE MAINTENANCE

Authors
EBERT CW PETICOLAS LJ REYNOLDS CL VUONG HH
Citation
Cw. Ebert et al., IMPROVEMENT IN MOLECULAR-BEAM EPITAXY MACHINE RELIABILITY USING PREVENTIVE MAINTENANCE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 616-619
Citations number
NO
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
2
Year of publication
1994
Pages
616 - 619
Database
ISI
SICI code
1071-1023(1994)12:2<616:IIMEMR>2.0.ZU;2-S