Sn. Miskovsky et al., CALCULATED IV CHARACTERISTICS OF A GOLD LIQUID-METAL ION-SOURCE FOR APROTOTYPE EMITTER MODELED AS A CONE SPHERE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 737-744
The operational properties of liquid metal ion sources (LMIS) have bee
n studied extensively the last three decades. Nevertheless, debate sti
ll exists on the emitter shape and the mechanism(s) responsible for io
n emission. It is generally believed that prior to onset, the applied
electric field causes a (cuspidal) deformation of the liquid emitter s
urface. This study will use the cone-sphere as a prototype for the emi
tter surface. The advantage of the cone-sphere model is its ability to
replicate analytically the emitter shapes seen experimentally, since
one can independently choose the radius of curvature, R, the ''form fa
ctor'' k (which determines the amount of ''necking'') and the asymptot
ic cone angle. The I-V characteristics of a cone-sphere model of a Au
LMIS were calculated using the image hump (IH) and charge exchange (CE
) models for the field evaporation process. Field evaporation is assum
ed to be thermally activated and follow an Arrenhius expression of the
form exp(-Q(n)/kT), where Q(n) is the activation energy. The multidim
ensionality of the source is accounted for in the calculation of the e
xact field variation on the three-dimensional surface of the liquid em
itter. The calculation of Q(n) in the image hump model follows a stand
ard procedure. However, the evaluation of Q(n) for the charge exchange
model differs from that done by others. First, the atomic energy curv
e for Au is calculated using the universal binding energy curve of Smi
th et al. [J. R. Smith, J. Ferrante, and J. H. Rose, Phys. Rev. B 25,
1149 (1982)]. The intersection of the atomic and ionic potential energ
y curves is determined as a function of field. The quantity Q(n) is th
en the energy difference between the minimum of the atomic energy curv
e and its value at the intersection. The I-V characteristics for Au ob
tained using the CE model are in better qualitative agreement with exp
erimental results for Au and Cs than the IH model in the voltage range
from 1 to 10 kV. In paricular, the calculated curves exhibit a defini
tive onset voltage, a sharp rapid rise, and saturation behavior.