PAPERS FROM THE 1ST INTERNATIONAL WORKSHOP ON PLASMA-BASED ION-IMPLANTATION - 4-6 AUGUST 1993 UNIVERSITY-OF-WISCONSIN-MADISON MADISON, WISCONSIN - PREFACE

Authors
CONRAD JR SRIDHARAN K
Citation
Jr. Conrad et K. Sridharan, PAPERS FROM THE 1ST INTERNATIONAL WORKSHOP ON PLASMA-BASED ION-IMPLANTATION - 4-6 AUGUST 1993 UNIVERSITY-OF-WISCONSIN-MADISON MADISON, WISCONSIN - PREFACE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 813-814
Citations number
NO
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
2
Year of publication
1994
Pages
813 - 814
Database
ISI
SICI code
1071-1023(1994)12:2<813:PFT1IW>2.0.ZU;2-F