ION-MATRIX SHEATH AROUND A SQUARE BAR

Authors
SHERIDAN TE ALPORT MJ
Citation
Te. Sheridan et Mj. Alport, ION-MATRIX SHEATH AROUND A SQUARE BAR, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 897-900
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
2
Year of publication
1994
Pages
897 - 900
Database
ISI
SICI code
1071-1023(1994)12:2<897:ISAASB>2.0.ZU;2-0
Abstract
The structure of the ion-matrix sheath surrounding a square bar is cal culated. Equipotentials and field lines are presented, and the sheath width and eccentricity are calculated as a function of the bar width.