Te. Sheridan et Mj. Alport, ION-MATRIX SHEATH AROUND A SQUARE BAR, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 897-900
The structure of the ion-matrix sheath surrounding a square bar is cal
culated. Equipotentials and field lines are presented, and the sheath
width and eccentricity are calculated as a function of the bar width.