NITROGEN PROFILES OF HIGH-DOSE, HIGH-TEMPERATURE PLASMA SOURCE ION-IMPLANTATION TREATED AUSTENITIC STAINLESS-STEEL

Authors
FRANKLYN CB NOTHNAGEL G
Citation
Cb. Franklyn et G. Nothnagel, NITROGEN PROFILES OF HIGH-DOSE, HIGH-TEMPERATURE PLASMA SOURCE ION-IMPLANTATION TREATED AUSTENITIC STAINLESS-STEEL, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 923-926
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
2
Year of publication
1994
Pages
923 - 926
Database
ISI
SICI code
1071-1023(1994)12:2<923:NPOHHP>2.0.ZU;2-#
Abstract
Plasma source ion implantation over a period of 30 min, with actual io n implantation times of approximately 15 s, has been studied. Estimate s of steady-state heat diffusion indicate bulk average temperatures of <50-degrees-C. Experimental profiles show nitrogen diffusion up to > 1 mum, indicating surface temperatures of approximately 500-degrees-C. Resultant implantation and diffusion profiles are compared with conve ntional plasma nitrided samples.