NITROGEN PLASMA SOURCE ION-IMPLANTATION OF ALUMINUM

Authors
Citation
Kc. Walter, NITROGEN PLASMA SOURCE ION-IMPLANTATION OF ALUMINUM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 945-950
Citations number
15
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
12
Issue
2
Year of publication
1994
Pages
945 - 950
Database
ISI
SICI code
1071-1023(1994)12:2<945:NPSIOA>2.0.ZU;2-M
Abstract
Nitrogen plasma source ion implantation has been applied to pure alumi num and aluminum alloy 7075 (Al-Cu-Mg-Zn). Nitrogen implantation modif ied the surface properties through transformation of the surface to al uminum-nitride (AlN). A uniformly thick (approximately 0.15 mum), poly crystalline (approximately 30 nm grain size) and continuous AlN layer was formed on both pure aluminum and 7075. Knoop microhardness tests s howed an increase in surface hardness at low loads. Pin-on-disk wear t ests showed nitrogen implantation decreased the wear rates by a factor of approximately 10 for alloy 7075. This study demonstrates significa nt modification of the tribological properties of an aluminum surface can be accomplished using nitrogen plasma source ion implantation.