GROWTH-STUDIES ON IN0.5GA0.5AS ALGAAS QUANTUM-WELLS GROWN ON GAAS WITH A LINEARLY GRADED INGAAS BUFFER/

Authors
Citation
Hc. Chui et Js. Harris, GROWTH-STUDIES ON IN0.5GA0.5AS ALGAAS QUANTUM-WELLS GROWN ON GAAS WITH A LINEARLY GRADED INGAAS BUFFER/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 1019-1022
Citations number
11
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
12
Issue
2
Year of publication
1994
Pages
1019 - 1022
Database
ISI
SICI code
1071-1023(1994)12:2<1019:GOIAQG>2.0.ZU;2-4
Abstract
High indium content InGaAs/AlGaAs quantum wells (QWs) are useful for m odulator and intersubband applications. Growth of these highly straine d QWs on GaAs has been facilitated by the use of a linearly graded InG aAs buffer. We present here growth studies performed on these QW struc tures. Buffer parameters including buffer substrate temperature, buffe r grading rate, and final buffer indium composition are studied. QW pa rameters including QW substrate temperature, the use of GaAs interface smoothing layers, and barrier substrate temperature are also investig ated. Using near optimized growth conditions, narrow linewidth intersu bband transitions are demonstrated.