Hc. Chui et Js. Harris, GROWTH-STUDIES ON IN0.5GA0.5AS ALGAAS QUANTUM-WELLS GROWN ON GAAS WITH A LINEARLY GRADED INGAAS BUFFER/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 1019-1022
High indium content InGaAs/AlGaAs quantum wells (QWs) are useful for m
odulator and intersubband applications. Growth of these highly straine
d QWs on GaAs has been facilitated by the use of a linearly graded InG
aAs buffer. We present here growth studies performed on these QW struc
tures. Buffer parameters including buffer substrate temperature, buffe
r grading rate, and final buffer indium composition are studied. QW pa
rameters including QW substrate temperature, the use of GaAs interface
smoothing layers, and barrier substrate temperature are also investig
ated. Using near optimized growth conditions, narrow linewidth intersu
bband transitions are demonstrated.