OPERATION OF A MOLECULAR-BEAM EPITAXY MACHINE EMPLOYING A VALVED SOLID PHOSPHORUS SOURCE

The use of an elemental source molecular-beam epitaxy (MBE) machine fo r the growth of phosphides requires hardware and operating procedures different from those normally encountered in the growth of arsenides. The main hardware alterations are the use of valved group V cracker so urces and different pumping schemes. Operating procedures must be deve loped to cope with higher operating pressures and flammable deposits. High-quality phosphides and abrupt arsenide/phosphide interfaces are n ow possible using elemental source MBE.