I. Bozovic et al., ATOMIC LAYER-BY-LAYER EPITAXY OF CUPRATE SUPERCONDUCTORS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 1170-1173
A technique for atomic layer-by-layer epitaxy of cuprate superconducto
rs and other complex oxides has been developed at Varian. The samples
are engineered by stacking molecular layers of different compounds to
assemble multilayers and superlattices, by adding or omitting atomic m
onolayers to create novel compounds, and by doping within specified at
omic monolayers. Apart from manufacturing trilayer Josephson junctions
with I(c)R(n)>5 mV, this technique enables one to address fundamental
issues such as the dimensionality of HTSC state, existence of long-ra
nge proximity effects, occurrence of resonant tunneling etc., as well
as to synthesize novel metastable HTSC compounds.