ATOMIC NITROGEN-PRODUCTION IN A MOLECULAR-BEAM EPITAXY COMPATIBLE ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE

Authors
VAUDO RP COOK JW SCHETZINA JF
Citation
Rp. Vaudo et al., ATOMIC NITROGEN-PRODUCTION IN A MOLECULAR-BEAM EPITAXY COMPATIBLE ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 1232-1235
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
2
Year of publication
1994
Pages
1232 - 1235
Database
ISI
SICI code
1071-1023(1994)12:2<1232:ANIAME>2.0.ZU;2-M
Abstract
The first high-resolution study of the optical emission from nitrogen plasmas produced by an ASTeX compact electron cyclotron resonance (ECR ) microwave plasma source is reported. The spectroscopic results clear ly show that the ECR plasma source generates an appreciable flux of ni trogen atoms, as indicated by strong atomic emission lines in the near -infrared spectral region, in addition to various species of molecular nitrogen.