Zr. Wasilewski et al., STUDIES OF SI SEGREGATION IN GAAS USING CURRENT-VOLTAGE CHARACTERISTICS OF QUANTUM-WELL INFRARED PHOTODETECTORS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 1273-1276
Segregation of Si in molecular beam epitaxy grown GaAs quantum wells i
s investigated using current-voltage characteristics (I-V) of quantum
well infrared photodetectors. Theoretical modeling is used to derive t
he extent of segregation from the measured ratio of dark currents thro
ugh the device in forward and reverse directions. The segregation leng
th, expressed in angstrom per decade of concentration decay, increases
from 12 to 52 angstrom on increasing the growth temperature from 550
to 605-degrees-C. Tle character of this increase indicates that Si seg
regation is kinetically limited in this temperature range, but approac
hes thermal equilibrium above 600-degrees-C. The effect of arsenic ove
rpressure on the segregation length at a growth temperature of 595-deg
rees-C is also studied. An increased overpressure of arsenic suppresse
s Si segregation for both dimeric and tetrameric forms of As. The effe
ct of As2 is Very small, with the segregation length decreasing from 5
2 to 48 angstrom on increasing the arsenic flux by a factor of eight f
rom its nominal value. The same increase in flux gives a much stronger
suppression of Si segregation if AS4 is used: the segregation length
decreases from 51 to 40 angstrom.