NEW METHOD TO PREDICT CORROSION CHARACTERISTICS OF ZN-METALLIZED THIN-FILMS FOR FILM CAPACITORS

The relationship between the microstructural parameters, e.g., grain s ize and preferred orientation, and the corrosion characteristics of Zn -metallized thin films was investigated. The Zn-metallized thin films with various grain sizes and preferred orientations were prepared by c hanging evaporation conditions, e.g., the temperature of the Zn source and the substrate temperature. By increasing the temperature of the Z n source and decreasing the substrate temperature, the grain size and the values of full width half-maximum (FWHM) of the (002) x-ray diffra ction peaks of Zn decreased. From measurements of resistivity change i n the thin films a function of time at the temperature of 40 degrees C and the relative humidity of 80%, it was found that the relative chan ge in the value of Omega/sq decreased by decreasing the grain size and the FWHM values of the (002) peaks of Zn. Tt suggests that the FWHM m easurement of the (002) peak of Zn is a simple method by which to pred ict the corrosion characteristics of Zn-metallized thin films. (C) 199 5 American Vacuum Society.