Surface tension of molten Si was measured by the sessile drop method i
n Ar atmosphere with different oxygen partial pressures. It was found
that the surface tension of molten Si decreased with increasing temper
ature, and it was 825 mN/m at the melting point (about 1415 degrees C)
in a pure Ar atmosphere. The surface tension also decreased with incr
easing oxygen partial pressure in the Ar atmosphere, and the temperatu
re coefficient of the surface tension changed from -0.1 mN/(mK) to abo
ut -0.26 mN/(mK) with increasing oxygen partial pressure from 0 to 0.3
19 Torr.