A heterogeneous source for the nucleation of inclined planar defects w
ithin a Mn-doped ZnSe/GaAs epitaxial layer grown by metalorganic vapou
r phase epitaxy is identified as MnSe particles at the ZnSe/GaAs inter
face (it is possible that the particles contain up to 6% Zn). The MnSe
particles have the rock-salt crystal structure and are randomly distr
ibuted along the interface. The planar defects emanate from the rough
interface between ZnSe and the particles and nucleation is probably me
diated by the 3.8% lattice misfit between ZnSe and MnSe.