The heat evolution of exothermic reactions and the thermal response to
electrical and chemical heating of small volumes of solids and liquid
s were studied using thermopiles with free-standing thin-film membrane
s. Therefore, the adapted layout of a miniaturized absolute radiometer
was used. The chosen arrangement is marked by the combination of high
ly sensitive thermopiles with an extreme reduction of parasitic heat c
apacity in comparison with conventional calorimeters or sensors. The s
ample is in contact with the free-standing membrane only, so a very sm
all heat flow to the heat sink of the sensor substrate is guaranteed.
A thermopile transducer made from 76 bismuth/antimony thin-film thermo
couples was used for the measurement of temperature differences betwee
n sample and surroundings. Thin-film heaters of copper and silver were
integrated into the microsystem. The average thickness of the whole t
hin-film system is less than 5 mu m. Microcalorimetric measurements we
re carried out in the temperature range 295-373 K, where thermoelectri
cal transducer signals up to 750 mV were observed. Evaporation, meltin
g, solidification, redox reactions and enzymatic reactions were tested
as examples, where a sample quantity in the nmole range was found to
be sufficient.